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Hydrogen is used in crystal growth and contrast preparation, oxidation process, epitaxial process and chemical phase deposition (CVD). The semiconductor industry has extremely high requirements for gas purity, and the "doping" of trace impurities will change the surface activity of semiconductors. When silicon uses hydrogen chloride to generate chlorine trichloride SIHCI3, it is separated through a separation process and reduced with hydrogen at high temperature to achieve the purity required by the semiconductor: SIHCI3+H2----Si+3HCI. The purity requirements for hydrogen in the process is very high. The traces of carbon monoxide and carbon dioxide impurities contained in hydrogen can oxidize the substrate and generate polysilicon. If it contains methane, silicon carbide will enter the outer layer and cause defects. In the past, silicon external delay required oxygen content to be less than 1*10-6 and dew point to be lower than -70C. Now the requirements are more stringent. Hydrogen generation by water electrolysis can better meet the high requirements of the semiconductor industry for hydrogen.


Domestic hydrogen production system by water electrolysis Beijing Zhongdian Fengye Technology Development Co., Ltd. provides you with the most advanced water electrolysis hydrogen production device and the best on-site hydrogen production, storage and use scheme.


Advantages of Hg series hydrogen production equipment


Ultrapure hydrogen

The purity of hydrogen produced by the equipment is up to 99.999%. The system can monitor the purity of hydrogen and oxygen in real time. This function will extend the service life of the equipment and greatly reduce the maintenance and replacement cost.


Proven reliability

Durable stainless steel parts maximize the service life of the equipment. It has been proved that the service life of the equipment is more than 25 years.


Easy to install

The hydrogen production system adopts modular integrated design, which is easy to install on site. Strict process control Each step of product design, material selection and processing is strictly controlled to ensure that each set of equipment is higher than the needs of users.


Gas production on demand
-The maximum pressure is 3.2Mpa -Hydrogen output of single unit is 2-500m3 / h -According to the customer’s hydrogen demand, we can design and produce equipment with higher gas yield and purity


Custom design
We can provide customized design of hydrogen production equipment to optimize and integrate the existing plants and facilities of customers. Professional maintenance and upgrading of old system He has rich experience in the maintenance and upgrading of domestic hydrogen generator


Safe and unattended operation -Automatic operation, system with diagnostic function -When the system is running, there is a minimum amount of gas inside, and the whole system adopts non spark intrinsically safe components -System redundancy control design, correlation control -Remote monitoring and operation function can be selected -The system runs automatically without manual intervention.

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